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Surface nanopatterning of Si by ion beam irradiation with sub-sputter-threshold energy
J. Seo
,
H. Jeong
,
W. Kim
,
J. Muñoz-García
,
M. Castro
,
R. Cuerno
,
J.-S. Kim
October 2025
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DOI
URL
Type
Journal article
Publication
Physical Review B
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